GaSonics AURA1000/AE2001/L3510 Sales/Services

Junr Technology is a professional second-hand semiconductor equipment supplier and service provider. Our company focuses on providing AURA1000, AE2001 and L3510 equipment, and pro-vides technical services such as equipment renovation (focusing on Chamber renovation), renova-tion (arm renovation), maintenance and installation, We provide related accessories and consum-ables. The consumables and accessories provided by our company have our LOGO and unifiednumber.look forward to working with your cooperation.

• ● Supply AURA1000/LAE2001/L3510
• ● Supply Full Series Accessories of AURA1000/AE2001/L3510
• ● Technical Services About AURA1000/AE2001/L3510 (Such As Renovation, Modification and Maintenance)

• ● Features:
• Cassette to cassette wafer handling
• Front and backside etching
• Variable platen temperature
• Alumina(ceramic) plasma tube
• Fluorine compatible chamber
• SECS ll interface
• Multiple step process capability
• Stand alone/ floor standing model

• ● GaSonics L3510Elsotropic Etch System
• ● Description:
• The GaSonics L3510E is a high etch rate,downstream isotropic etching system.
• designed to provide isotropic profiles along with the ability to etch or ash at low temperatures Utilizing the proven L-Series 3510 platform,the etch system also uses the downstream microwave sources and applicator.With excellent process controls.
• the 3510E provides a wide range of process capabilities and applications.
• The system also includes a topside lamp option for heating the substrates in a “pins up” mode.
• The “pins up" mode allows backside etching of various materials.